Study on structural and optical properties of TiO2 ALD coated silicon nanostructures

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dc.contributor.authorPavlenko, Mykola
dc.contributor.authorMyndrul, Valerii
dc.contributor.authorIatsunskyi, Igor
dc.contributor.authorJurga, Stefan
dc.contributor.authorSmyntyna, Valentyn A.
dc.date.accessioned2017-10-26T09:30:10Z
dc.date.available2017-10-26T09:30:10Z
dc.date.issued2016
dc.description.abstractStructural and optical properties of TiO2 ALD coated silicon nanostructures were investigated. The morphology and chemical composition of TiO2 coated silicon nanopillars and porous silicon were studied by using methods of scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Optical characteristics were studied using measurements of reflectance and luminescence spectra. Detailed analysis of morphological features and photoluminescence mechanisms were provided. Peculiarities of reflectance spectra were discussed. It was shown the possible application of these structures as antireflectance coatings.uk
dc.identifierDOI: 10.1117/12.2227122
dc.identifier.citationNanophotonics VIuk
dc.identifier.urihttps://dspace.onu.edu.ua/handle/123456789/11182
dc.language.isoenuk
dc.relation.ispartofseries;Vol. 9884 98842H-1
dc.subjectporous siliconuk
dc.subjectnanopillarsuk
dc.subjectatomic layer depositionuk
dc.subjecttitanium dioxideuk
dc.titleStudy on structural and optical properties of TiO2 ALD coated silicon nanostructuresuk
dc.typeArticleuk
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