Study on structural and optical properties of TiO2 ALD coated silicon nanostructures
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Дата
2016
Науковий керівник
Укладач
Редактор
Назва журналу
ISSN
E-ISSN
Назва тому
Видавець
Анотація
Structural and optical properties of TiO2 ALD coated silicon nanostructures were investigated. The morphology and chemical composition of TiO2 coated silicon nanopillars and porous silicon were studied by using methods of scanning
electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Optical characteristics were studied using
measurements of reflectance and luminescence spectra. Detailed analysis of morphological features and photoluminescence mechanisms were provided. Peculiarities of reflectance spectra were discussed. It was shown the
possible application of these structures as antireflectance coatings.
Опис
Ключові слова
porous silicon, nanopillars, atomic layer deposition, titanium dioxide
Бібліографічний опис
Nanophotonics VI