Hrinevych, Viktor S.Savin, Serhii M.Smyntyna, Valentyn A.Filevska, Liudmila M.Ulug, B.Turkdemir, M. HalukUlug, A.Yaltkaya, S.2017-12-042017-12-042010Abstract of 4th International Scientific and Technical Conference “Sensor Electronics and Microsystem Technologies (SEMST-4)”, Ukraine, Odessa, June 28 – July 2, 2010.https://dspace.onu.edu.ua/handle/123456789/11703Thin films adsorptive sensitive elements based on oxide materials with nananosised grains found wide spread application in modern gas analyzers. Tin dioxide is one of such materials which have good sensitivity to some gases and chemically resistivity to some harmful and poisoning gases. Thus, investigation of the production processes of nanosized oxide materials layers, i.e. tin dioxide, is appeared to be important.enfilmssensitiveoxide materialsArticle