Vashpanov, Yurii O.Smyntyna, Valentyn A.2018-06-012018-06-012001Фотоэлектроника = Photoelectronicshttps://dspace.onu.edu.ua/handle/123456789/16448The degradation mechanism of adsorption sensitivity for thin semiconductor films is investigated. On the base of the carried research it is established that thin films of cadmium selenide and zinc oxide with doping surface of indiums’ atoms have high adsorption sensitivity and stability to oxygen adsorption. This effect is connected with electronic and chemical properties of indiums’ clusters on surface of semiconductor films.enseleniumdiffusionoxygenelectronsStudy in degradation mechanism of adsorption sensitivity and increase of stability of oxygen microelectronic sensorsArticle