Viter, Roman V.2018-06-062018-06-062004Фотоэлектроника = Photoelectronicshttps://dspace.onu.edu.ua/handle/123456789/16616Sensitive properties of metal oxides to different toxic gases have been investigated since the sixties [1—4]. Deposition technologies and experimental methods to investigate metal oxide properties are highly developed [5, 6]. However, there are some problems which are still being developed: decreasing response time of sensors declining selectivity and sensitivity to different gases and preventing water influence on sensor response.entoxicoxidesensorssensitivityArticle